4/17/2011	11:01:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/17/2011	11:01:11 PM	Recipe started at 11:01 PM
4/17/2011	11:01:11 PM	H2 valve closed
4/17/2011	11:01:11 PM	BCl3 valve closed
4/17/2011	11:01:11 PM	PH3 valve closed
4/17/2011	11:01:11 PM	SiCl4 pre valve closed
4/17/2011	11:01:11 PM	SiCl4 post valve closed
4/17/2011	11:01:11 PM	Main Vac valve closed
4/17/2011	11:01:11 PM	Bypass valve closed
4/17/2011	11:01:11 PM	Bubbler valve closed
4/17/2011	11:01:11 PM	Helium valve opened
4/17/2011	11:01:11 PM	Helium MFC set to  500.000000
4/17/2011	11:01:11 PM	H2 MFC set to  0.000000
4/17/2011	11:01:11 PM	BCl3 MFC set to  0.000000
4/17/2011	11:01:11 PM	PHl3 MFC set to  0.000000
4/17/2011	11:01:11 PM	SiCl4 MFC set to  0.000000
4/17/2011	11:01:11 PM	Bypass solenoid MFC set to  0.000000
4/17/2011	11:01:11 PM	Tube furnace set to 0
4/17/2011	11:02:31 PM	Helium valve closed
4/17/2011	11:02:31 PM	H2 valve closed
4/17/2011	11:02:31 PM	BCl3 valve closed
4/17/2011	11:02:31 PM	PH3 valve closed
4/17/2011	11:02:31 PM	SiCl4 pre valve closed
4/17/2011	11:02:31 PM	SiCl4 post valve closed
4/17/2011	11:02:31 PM	Main Vac valve closed
4/17/2011	11:02:31 PM	Bypass valve closed
4/17/2011	11:02:31 PM	Bubbler valve closed
4/17/2011	11:02:31 PM	Helium MFC set to  0.000000
4/17/2011	11:02:31 PM	H2 MFC set to  0.000000
4/17/2011	11:02:31 PM	BCl3 MFC set to  0.000000
4/17/2011	11:02:31 PM	PHl3 MFC set to  0.000000
4/17/2011	11:02:31 PM	SiCl4 MFC set to  0.000000
4/17/2011	11:02:31 PM	Bypass solenoid MFC set to  0.000000
4/17/2011	11:02:31 PM	Tube furnace set to 0
4/17/2011	11:02:31 PM	Run finished at 11:02 PM
4/17/2011	11:02:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/17/2011	11:07:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/17/2011	11:07:54 PM	Recipe started at 11:07 PM
4/17/2011	11:07:54 PM	Helium valve closed
4/17/2011	11:07:54 PM	H2 valve closed
4/17/2011	11:07:54 PM	BCl3 valve closed
4/17/2011	11:07:54 PM	PH3 valve closed
4/17/2011	11:07:54 PM	SiCl4 pre valve closed
4/17/2011	11:07:54 PM	SiCl4 post valve closed
4/17/2011	11:07:54 PM	Main Vac valve closed
4/17/2011	11:07:54 PM	Bubbler valve closed
4/17/2011	11:07:54 PM	Bypass valve opened
4/17/2011	11:07:54 PM	Helium MFC set to  0.000000
4/17/2011	11:07:54 PM	H2 MFC set to  0.000000
4/17/2011	11:07:54 PM	BCl3 MFC set to  0.000000
4/17/2011	11:07:54 PM	PHl3 MFC set to  0.000000
4/17/2011	11:07:54 PM	SiCl4 MFC set to  0.000000
4/17/2011	11:07:54 PM	Bypass solenoid MFC set to  0.000000
4/17/2011	11:07:54 PM	Tube furnace set to 0
4/17/2011	11:08:25 PM	Helium valve closed
4/17/2011	11:08:25 PM	H2 valve closed
4/17/2011	11:08:25 PM	BCl3 valve closed
4/17/2011	11:08:25 PM	PH3 valve closed
4/17/2011	11:08:25 PM	SiCl4 pre valve closed
4/17/2011	11:08:25 PM	SiCl4 post valve closed
4/17/2011	11:08:25 PM	Bubbler valve closed
4/17/2011	11:08:25 PM	Main Vac valve opened
4/17/2011	11:08:25 PM	Bypass valve opened
4/17/2011	11:08:25 PM	Helium MFC set to  0.000000
4/17/2011	11:08:25 PM	H2 MFC set to  0.000000
4/17/2011	11:08:25 PM	BCl3 MFC set to  0.000000
4/17/2011	11:08:25 PM	PHl3 MFC set to  0.000000
4/17/2011	11:08:25 PM	SiCl4 MFC set to  0.000000
4/17/2011	11:08:25 PM	Bypass solenoid MFC set to  0.000000
4/17/2011	11:08:25 PM	Tube furnace set to 0
4/17/2011	11:08:26 PM	Run finished at 11:08 PM
4/17/2011	11:08:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/17/2011	11:16:15 PM	Program exited cleanly
4/17/2011	11:19:03 PM	Program started normally
4/17/2011	11:19:03 PM	Helium valve closed
4/17/2011	11:19:03 PM	H2 valve closed
4/17/2011	11:19:03 PM	BCl3 valve closed
4/17/2011	11:19:03 PM	PH3 valve closed
4/17/2011	11:19:03 PM	SiCl4 pre valve closed
4/17/2011	11:19:04 PM	SiCl4 post valve closed
4/17/2011	11:19:04 PM	Main Vac valve closed
4/17/2011	11:19:04 PM	Bypass valve closed
4/17/2011	11:19:04 PM	Bubbler valve closed
4/17/2011	11:19:04 PM	Helium MFC set to  0.000000
4/17/2011	11:19:04 PM	H2 MFC set to  0.000000
4/17/2011	11:19:04 PM	BCl3 MFC set to  0.000000
4/17/2011	11:19:04 PM	PHl3 MFC set to  0.000000
4/17/2011	11:19:04 PM	SiCl4 MFC set to  0.000000
4/17/2011	11:19:04 PM	Bypass solenoid MFC set to  760.000000
4/17/2011	11:19:04 PM	Tube furnace set to 0
4/17/2011	11:19:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/17/2011	11:19:08 PM	Recipe started at 11:19 PM
4/17/2011	11:19:08 PM	Helium valve closed
4/17/2011	11:19:08 PM	H2 valve closed
4/17/2011	11:19:08 PM	BCl3 valve closed
4/17/2011	11:19:08 PM	PH3 valve closed
4/17/2011	11:19:08 PM	SiCl4 pre valve closed
4/17/2011	11:19:08 PM	SiCl4 post valve closed
4/17/2011	11:19:08 PM	Main Vac valve closed
4/17/2011	11:19:08 PM	Bubbler valve closed
4/17/2011	11:19:08 PM	Bypass valve opened
4/17/2011	11:19:08 PM	Helium MFC set to  0.000000
4/17/2011	11:19:08 PM	H2 MFC set to  0.000000
4/17/2011	11:19:08 PM	BCl3 MFC set to  0.000000
4/17/2011	11:19:08 PM	PHl3 MFC set to  0.000000
4/17/2011	11:19:08 PM	SiCl4 MFC set to  0.000000
4/17/2011	11:19:08 PM	Bypass solenoid MFC set to  0.000000
4/17/2011	11:19:08 PM	Tube furnace set to 0
4/17/2011	11:19:08 PM	Helium valve closed
4/17/2011	11:19:08 PM	H2 valve closed
4/17/2011	11:19:08 PM	BCl3 valve closed
4/17/2011	11:19:08 PM	PH3 valve closed
4/17/2011	11:19:08 PM	SiCl4 pre valve closed
4/17/2011	11:19:08 PM	SiCl4 post valve closed
4/17/2011	11:19:08 PM	Bubbler valve closed
4/17/2011	11:19:08 PM	Main Vac valve opened
4/17/2011	11:19:08 PM	Bypass valve opened
4/17/2011	11:19:08 PM	Helium MFC set to  0.000000
4/17/2011	11:19:08 PM	H2 MFC set to  0.000000
4/17/2011	11:19:08 PM	BCl3 MFC set to  0.000000
4/17/2011	11:19:08 PM	PHl3 MFC set to  0.000000
4/17/2011	11:19:08 PM	SiCl4 MFC set to  0.000000
4/17/2011	11:19:08 PM	Bypass solenoid MFC set to  0.000000
4/17/2011	11:19:09 PM	Tube furnace set to 0
4/17/2011	11:19:09 PM	Run finished at 11:19 PM
4/17/2011	11:19:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/17/2011	11:20:36 PM	Recipe started at 11:20 PM
4/17/2011	11:20:36 PM	BCl3 valve closed
4/17/2011	11:20:36 PM	PH3 valve closed
4/17/2011	11:20:36 PM	SiCl4 pre valve closed
4/17/2011	11:20:36 PM	SiCl4 post valve closed
4/17/2011	11:20:36 PM	Main Vac valve closed
4/17/2011	11:20:36 PM	Bypass valve closed
4/17/2011	11:20:36 PM	Bubbler valve closed
4/17/2011	11:20:36 PM	Helium valve opened
4/17/2011	11:20:36 PM	H2 valve opened
4/17/2011	11:20:36 PM	Helium MFC set to  190.000000
4/17/2011	11:20:36 PM	H2 MFC set to  10.000000
4/17/2011	11:20:36 PM	BCl3 MFC set to  0.000000
4/17/2011	11:20:36 PM	PHl3 MFC set to  0.000000
4/17/2011	11:20:36 PM	SiCl4 MFC set to  0.000000
4/17/2011	11:20:36 PM	Bypass solenoid MFC set to  0.000000
4/17/2011	11:20:36 PM	Tube furnace set to 0
4/17/2011	11:23:59 PM	BCl3 valve closed
4/17/2011	11:23:59 PM	PH3 valve closed
4/17/2011	11:23:59 PM	SiCl4 pre valve closed
4/17/2011	11:23:59 PM	SiCl4 post valve closed
4/17/2011	11:23:59 PM	Main Vac valve closed
4/17/2011	11:23:59 PM	Bypass valve closed
4/17/2011	11:23:59 PM	Helium valve opened
4/17/2011	11:23:59 PM	H2 valve opened
4/17/2011	11:23:59 PM	Bubbler valve opened
4/17/2011	11:23:59 PM	Helium MFC set to  47.500000
4/17/2011	11:23:59 PM	H2 MFC set to  2.500000
4/17/2011	11:23:59 PM	BCl3 MFC set to  0.000000
4/17/2011	11:23:59 PM	PHl3 MFC set to  0.000000
4/17/2011	11:23:59 PM	SiCl4 MFC set to  0.000000
4/17/2011	11:23:59 PM	Bypass solenoid MFC set to  0.000000
4/17/2011	11:24:00 PM	Tube furnace set to 350
